Abstract:Two ITO target samples provided from China and Japan were thoroughly analyzed and compared. The relationship between fracture morphology and mechanism of nodule formation of ITO target were discussed. The results show that majority parameters of both materials are analogous, such as relative density, electrical resistivity and oxygen deficiency. The two samples are in form of single phase crystal solid solution. The domestic material is a mixture of quasicleavage and dimple with large sized irregular particles in grain boundary. The Japan target is of cleavage fracture with clear grain boundary and invisible particle in grain boundary.