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| Thermodynamic Analysis of Zirconium Impurity in High Purified Titanium Prepared by Chemical Vapor Deposition |
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Received:October 21, 2011
Revised:October 26, 2011
Accepted:October 27, 2011
Published Online:February 24, 2012
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| DOI：doi：10.3969/j.issn.1007-7545.2012.03.009 |
| KeyWord:Zr; impurity; high purity; thermodynamics |
| Author | Institution |
| YANG Zhi-hong |
贵阳铝镁设计研究院 |
| LIU Li-na |
贵阳铝镁设计研究院 |
| SUN Ke-ping |
贵州大学 |
| WANG Ke-gong |
贵州大学 |
| CHEN Xiao-hu |
贵州大学 |
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| Abstract: |
| The preparation of high purity titanium with Chemical Vapor Deposition method (CVD) and thermodynamic behaviors of impurity element Zr were thermodynamic analyzed. The results show that, at the halide temperature of titanium, Zr generates ZrI2, ZrI3 and ZrI4 in the halide source area, and what is more, ZrI3 and ZrI4 tend to be generated. But ZrI2, ZrI3 and ZrI4 cannot decompose in the deposition area, nor is the zirconium in high purified titanium brought by the reaction of halogenation and deposition. |
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