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| Thermodynamic Study on Trichlorosilane Synthesis |
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Received:April 13, 2012
Revised:April 13, 2012
Accepted:April 16, 2012
Published Online:August 20, 2012
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| DOI：doi：10.3969/j.issn.1007-7545.2012.09.015 |
| KeyWord:trichlorosilane; thermodynamics; productivity; chemical equilibrium |
| Author | Institution |
| pengruzhen |
昆明理工大学冶金与能源工程学院 |
| yuxiaohua |
昆明理工大学冶金与能源工程学院 |
| xiegang |
昆明冶金研究院 |
| 姚云 |
昆明理工大学冶金与能源工程学院 |
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| Abstract: |
| The complex chemical reactions of trichlorosilane synthesis were investigated by means of thermodynamic software factsage. Diagrams of for the eight chemical reactions in this system versus temperature were plotted. When the reaction reached equilibrium, the relationship between gas phase compositions and temperature was analyzed at HCl/Si molar ratio of 1, 3 and 6 under the pressure of 0.01 MPa, 0.05 MPa and 0.1 MPa, respectively. The variation of trichlorosilane productivity with temperature, pressure and HCl/Si molar ratio were discussed. The results show that a lower temperatures, a higher pressures and a suitable HCl/Si molar ratio have a positive effect on the trichlorosilane synthesis process. |
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