|
| Fracture Morphology Analysis of ITO Target |
|
Received:April 16, 2014
Revised:April 21, 2014
Accepted:April 23, 2014
Published Online:September 19, 2014
|
| View Full Text View/Add Comment Download reader |
| DOI：10.3969/j.issn.1007-7545.2014.10.016 |
| KeyWord:ITO target; fracture; mixed acid; nodule formation |
| Author | Institution |
| Zeng Jishu |
广西华锡集团股份有限公司 广西 桂林 |
| Chen Jinquan |
广西华锡集团股份有限公司 广西 桂林 |
| Yang Mei |
广西华锡集团股份有限公司 广西 桂林 |
| Wu Bozeng |
广西华锡集团股份有限公司 |
|
| Hits: 3705 |
| Download times: 5844 |
| Abstract: |
| Two ITO target samples provided from China and Japan were thoroughly analyzed and compared. The relationship between fracture morphology and mechanism of nodule formation of ITO target were discussed. The results show that majority parameters of both materials are analogous, such as relative density, electrical resistivity and oxygen deficiency. The two samples are in form of single phase crystal solid solution. The domestic material is a mixture of quasicleavage and dimple with large sized irregular particles in grain boundary. The Japan target is of cleavage fracture with clear grain boundary and invisible particle in grain boundary. |
| Close |