Study on Ionic Liquids Conductivity and Dissolving by-Product SiCl4 from Polysilicon Industry
Received:February 29, 2016   Revised:March 02, 2016   Accepted:March 03, 2016      Published Online:July 21, 2016
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DOI:doi:10.3969/j.issn.1007-7545.2016.08.007
KeyWord:ionic liquids; dissolve; silicon tetrachloride; conductivity
                 
AuthorInstitution
Cheng Cheng 上海第二工业大学电子废弃物研究中心;上海电子废弃物资源化协同创新中心
Zhang Chenglong 上海第二工业大学电子废弃物研究中心;上海电子废弃物资源化协同创新中心
Wang Jingwei 上海第二工业大学电子废弃物研究中心;上海电子废弃物资源化协同创新中心
Bai Jianfeng 上海第二工业大学电子废弃物研究中心;上海电子废弃物资源化协同创新中心
Yuan Wenyi 上海第二工业大学电子废弃物研究中心;上海电子废弃物资源化协同创新中心
Xu Min 上海第二工业大学电子废弃物研究中心;上海电子废弃物资源化协同创新中心
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Abstract:
      Effects of temperature and addition of PC on dissolving of SiCl4 from polysilicon industry were investigated applying ionic liquids (ILs) called 1-butyl-3-methylimidazolium trifluoromethanesulfonate ([BMIM]OTf) and 1-octyl-3-methylimidazolium bis ((trifluoromethyl) sulfonyl) imide ([OMIM]NTf2) as solvents. ILs conductivity under different conditions was examined. The results show that [OMIM]NTf2 has better performance than [BMIM]OTf in dissolving load at different temperature. Dissolving load for SiCl4 in both ionic liquids rises with drop of temperature. [OMIM]NTf2 obtains a maximum dissolving load of 0.6 g/mL at 0℃. Little SiCl4 can be dissolved in PC with load of about 0.06 g/mL on average and temperature has little influence on load. Conductivity of ILs is low, and [BMIM]OTf has higher conductivity than [OMIM]NTf2. Conductivity of ILs rises with increase of temperature with a dramatic rise upon addition of some PC. It is proposed that [OMIM]NTf2 should be chosen as solvent to dissolve SiCl4 with mass ratio of [OMIM]NTf2 and SiCl4 of 1︰1 at 0 ℃ to realize conductivity of 15.08 mS/cm.
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