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| Research and Optimization of Sintering Curves for AlN Ceramic Substrates |
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Received:February 08, 2018
Revised:February 27, 2018
Accepted:February 27, 2018
Published Online:June 15, 2018
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| DOI：doi：10.3969/j.issn.1007-7545.2018.07.015 |
| KeyWord:AlN ceramic substrate; liquid phase sintering; holding time; sintering temperature; sintering curve |
| Author | Institution |
| Lv Shuaishuai |
南通大学 |
| Ni Wei |
南通大学 |
| Ni Hongjun |
南通大学 |
| MA Li-bin |
莱鼎电子材料科技有限公司 |
| TAO Jian-bing |
莱鼎电子材料科技有限公司 |
| KANG Wen-xiu |
莱鼎电子材料科技有限公司 |
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| Abstract: |
| Effects of heating rate, holding time, and sintering temperature of liquid phase sintering on properties of AlN ceramic substrate were studied. Warpage degree of samples at different heating rates of liquid phase sintering was measured to determine the optimum heating rate range of 0.2~0.5 ℃/min. The optimum holding time is 5 h and the maximum sintering temperature is 1 830 ℃ according to change of sample density with different holding time. The sintering curve after optimization has greater effect by comparing performance and microstructure of AlN ceramic substrate before and after optimization. |
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